266 nm | Fused Silica | Telecentric

Our telecentric F-Theta lenses for 266 nm have been specifically designed for laser applications in the deep UV range. They enable ultra-fine processing of transparent, ceramic, and polymer materials – especially in situations where minimal thermal impact and maximum geometric precision are required.

Thanks to their nearly perpendicular beam path (≈ 90° incidence angle) across the entire working field, they provide excellent spot symmetry – a key advantage for micro-structuring, sensitive substrates, and high-precision marking.

The lenses are available in various designs with input apertures from 10 to 14 mm and for working areas up to 175 × 175 mm.